DM

Sa J

Sa L

Si

ε_i(49%), %

2.76

3.34

3.07

3.67

ε_j(75%), %

4.80

5.21

5.27

5.88

ε_k(97%), %

12.78

13.73

15.19

16.57

^*i, (μm)

0.2

0.6

0.5

0.5

^*j, (μm)

0.5

1.5

1.2

1.2

^*k, (μm)

5.1

14.3

11.7

11.0